Thermoelectric properties of epitaxial ScN films deposited by reactive magnetron sputtering onto MgO(001) substrates
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EPITAXIAL GROWTH OF Pt ( 001 ) THIN FILMS ONMgO ( 001 ) UNDER OXIDIZING CONDITIONS
Epitaxial Pt(001) thin films have been grown on MgO(001) substrates using dc magnetron sputtering with an Ar/0 2 mixture at 700'C. The width (FWHM) of the rocking curve of the Pt(002) peak is between 0.160 and 0.200, which is only 0.05' wider than that of the MgO (002) peak of the cleaved substrate. The film surface roughness is about 1 nm (rms) for a 240 nm thick Pt film. No grain structure co...
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TiN thin films were deposited on MgO (100) substrates at different substrate temperatures using rf sputtering with Ar/N2 ratio of about 10. At 700°C, the growth rate of TiN was approximately 0.05 μm/h. The structural and electrical properties of TiN thin films were characterized with x-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electro...
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تاریخ انتشار 2016